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Applications of Scanning Defect Mapping System for Semiconductor Characterization

Author(s):
Carr, Kevin F.
Carlson, N.
Weitzman, P.
Sopori, B. L.
Marshall, C.
Allen, L.
1 more
Publication title:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
378
Pub. date:
1995
Page(from):
579
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992818 [1558992812]
Language:
English
Call no.:
M23500/378
Type:
Conference Proceedings

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