THIN FILM FINE LINE WORK OF ADHESION BY MICROWEDGE INDENTATION

THIN FILM FINE LINE WORK OF ADHESION BY MICROWEDGE INDENTATION

Author(s):

Publication title:

Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

356

Pub. Year:

1995

Page(from):

693

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992573 [155899257X]

Language:

English

Call no.:

M23500/356

Type:

Conference Proceedings

Details

TDL ID:	ZA00017048
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thin films
Conf. info. (Number):	5th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1994.11.28-1994.12.02

Similar Items:

1 Conference Proceedings THIN FILM ADHESION CHARACTERIZATION BY MICROWEDGE SCRATCHING OF PRECRACKED FINE LINES Boer, M. P. de, Huang, H., Gerberich, W. W. MRS - Materials Research Society	7 Conference Proceedings Superlayer residual stress effect on the indentation adhesion measurements Volinsky, Alex A., Moody, Neville R., Gerberich, William W. MRS-Materials Research Society
2 Conference Proceedings Experimental Considerations for Indentation-Induced Adhesion Measurement of Multilayered Thin Films Kriese, M. D., Moody, N. R., Gerberich, W. W. MRS - Materials Research Society	8 Conference Proceedings ADHESION STRENGTH OF Cu/POLYIMIDE MEASURED BY CONTINUOUS MICRO-WEDGE SCRATCH TEST Wang, F., Nelson, J. C., Huang, H., Boer, M. de, Gerberich, W. W., Swisher, R. L. MRS - Materials Research Society
3 Conference Proceedings Adhesion Assessment of Copper Thin Films Kriese, M. D., Moody, N. R., Gerberich, W. W. MRS - Materials Research Society	9 Conference Proceedings *A brittle to ductile transition (BDT) in adhered thin films Gerberich, W. W., Volinsky, A. A., Tymiak, N. I., Moody, N. R. MRS-Materials Research Society
4 Conference Proceedings Quantitative Measurement of the Effect of Annealing on the Adhesion of Thin Copper Films Using Superlayers Kriese, M. D., Moody, N. R., Gerberich, W. W. MRS - Materials Research Society	10 Conference Proceedings Indentation-induced debonding of ductile films Volinsky, Alex A., Clift, W. Miles, Moody, Neville R., Gerberich, William W. MRS-Materials Research Society
5 Conference Proceedings FRACTURE TOUGHNESS OF SILICON AND THIN FILM MICRO-STRUCTURES BY WEDGE INDENTATION Boer, M. P. de, Huang, He, Nelson, J. C., Jiang, Z. P., Gerberich, W. W. MRS - Materials Research Society	11 Conference Proceedings INTERFACE ROUGHNESS EFFECTS ON ADHESION OF Ta2N FILMS Moody, N. R., Venkataraman, S., Nelson, J., Worobey, W., Gerberich, W. W. MRS - Materials Research Society
6 Conference Proceedings ADHESION OF TUNGSTEN FINE LINES ON SiO2 BY MICRO-WEDGE SCRATCHING Boer, M. P. de, Huang, H., Nelson, J. C., Wang, F., Gerberich, W. W. MRS - Materials Research Society	12 Conference Proceedings *Annealing effects on interfacial fracture of gold-chromium films in hybrid microcircuits Moody, N. R., Adams, D. P., Volinsky, A. A., Kriese, M. D., Gerberich, W. W. MRS-Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12