COMPARISON OF MULTIPOLAR RESONANT-CAVITY AND MAGNETIC MIRROR MICROWAVE ECR SOURCES FOR DRY ETCHING OF III-V SEMICONDUCTORS
- Author(s):
- Publication title:
- Microwave processing of materials IV : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 347
- Pub. Year:
- 1994
- Page(from):
- 441
- Pub. info.:
- Pittsburgh,, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992474 [1558992472]
- Language:
- English
- Call no.:
- M23500/347
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
MRS - Materials Research Society |
Materials Research Society |
Electrochemical Society |
3
Conference Proceedings
HIGH DENSITY MAGNETICALLY CONFINED DRY ETCHING OF METALLIZATION AND DIELECTRICS IN GaAs DEVICE TECHNOLOGY
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
12
Conference Proceedings
Fabrication of Novel III-N and III-V Modulator Structures by ECR Plasma Etching
MRS - Materials Research Society |