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COMPARISON OF MULTIPOLAR RESONANT-CAVITY AND MAGNETIC MIRROR MICROWAVE ECR SOURCES FOR DRY ETCHING OF III-V SEMICONDUCTORS

Author(s):
Publication title:
Microwave processing of materials IV : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
347
Pub. Year:
1994
Page(from):
441
Pub. info.:
Pittsburgh,, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992474 [1558992472]
Language:
English
Call no.:
M23500/347
Type:
Conference Proceedings

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