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CHARACTERIZATION OF InP/GaInAs NANOMETER SIZED COLUMNS PRODUCED BY AEROSOL DEPOSITION AND PLASMA ETCHING

Author(s):
Maximov, I.
Deppert, K.
Montelius, L.
Samuelson, L.
Gray, S.
Johansson, M.
Hansson, H. -C.
Wiedensohler, A.
3 more
Publication title:
Determining nanoscale physical properties of materials by microscopy and spectroscopy
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
332
Pub. Year:
1994
Page(from):
513
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992313 [1558992316]
Language:
English
Call no.:
M23500/332
Type:
Conference Proceedings

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