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Processing applications with the 157-nm fluorine excimer laser

Author(s):
Herman,P.R. ( Univ.of Toronto )
Beckley,K.
Jackson,B.
Kurosawa,K.
Moore,D.
Yamanishi,T.
Yang,J.
2 more
Publication title:
Excimer lasers, optics, and applications : 12-13 February 1997, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2992
Pub. Year:
1997
Page(from):
86
Page(to):
95
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819424037 [081942403X]
Language:
English
Call no.:
P63600/2992
Type:
Conference Proceedings

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