Optical methods for characterization of MEMS device motion

Optical methods for characterization of MEMS device motion

Author(s):

Nelson,P.R. ( Univ.of California/Los Angeles )
Chu,P.B.
Pister,K.S.J.

Publication title:

Microlithography and Metrology in Micromachining

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2640

Pub. Year:

1995

Page(from):

53

Page(to):

57

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420060 [0819420069]

Language:

English

Call no.:

P63600/2640

Type:

Conference Proceedings

Details

TDL ID:	ZA00017004
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microlithography and Metrology in Micromachining
Conf. info. (Number):	1995
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1995.10.23-1995.10.24

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