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Testing of optical materials for 193-nm applications

Author(s):
Liberman, V. ( Massachusetts Institute of Technology )
Rothschild, M.
Sedlacek, J.H.C.
Uttaro, R.S.
Grenville, A.
Bates, A.K.
Van Peski, C.
2 more
Publication title:
Optical systems contamination and degradation : 20-23 July 1998, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3427
Pub. Year:
1998
Page(from):
411
Page(to):
418
Pub. info.:
Bellingham, Wash., USA: SPIE
ISSN:
0277786X
ISBN:
9780819428820 [0819428825]
Language:
English
Call no.:
P63600/3427
Type:
Conference Proceedings

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