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Analysis of the thickness measurement of multilayer optical thin films with grazing incident x ray

Author(s):
  • Li,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Song,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Qu,Y. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Li,M. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Zhang,X. ( Changchun Institute of Optics and Fine Mechanics (China) )
Publication title:
Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3175
Pub. Year:
1998
Page(from):
470
Page(to):
473
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426734 [0819426733]
Language:
English
Call no.:
P63600/3175
Type:
Conference Proceedings

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