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Ion implantation in dielectric thin films for passive and active components (Invited Paper)

Author(s):
Flory,F. ( Ecole National Superieure de Physique de Marseille (France) )
Roux,L. ( Ion Beam Service (France) )
Tisserand,S. ( Ecole National Superieure de Physique de Marseille (France) )
Rigneault,H. ( Ecole National Superieure de Physique de Marseille (France) )
Robert,S. ( Ecole National Superieure de Physique de Marseille (France) )
Mathieu,G. ( Ion Beam Service (France) )
1 more
Publication title:
Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3175
Pub. Year:
1998
Page(from):
15
Page(to):
20
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426734 [0819426733]
Language:
English
Call no.:
P63600/3175
Type:
Conference Proceedings

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