Blank Cover Image

Effect of argon or nitrogen preamorphized implant on SALICIDE formation for deep submicron CMOS technology

Author(s):
Ho,C.S. ( National Univ.of Singapore )
Pey,K.L. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Wong,H. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Karunasiri,R.P.G. ( National Univ.of Singapore )
Chua,S.J. ( National Univ.of Singapore )
Lee,K.H. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Tang,Y. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Wong,S.M. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
Chan,L.H. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )
4 more
Publication title:
Microlithographic Techniques in IC Fabrication
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3183
Pub. date:
1997
Page(from):
243
Page(to):
254
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426109 [0819426105]
Language:
English
Call no.:
P63600/3183
Type:
Conference Proceedings

Similar Items:

Lim,C.W,, Lahiri,S.K., Tung,C.H., Wong,S.M., Lee,K.H., Wong,H., Pey,K.L., Chan,L.H.

SPIE-The International Society for Optical Engineering

Pandey,S.M., Jain,H., Pal,D.K., Roy,J.N.

SPIE - The International Society for Optical Engineering

Chua, H. N., Pey, K. L., Siah, S. Y., Lim, E. H., Ho, C. S.

MRS - Materials Research Society

Park, J.S., Karunasiri, R.P.G., Wang, K.L., Mii, Y.J., Murray, J.

Materials Research Society

Lim,E.H., Siah,S.-Y., Lim,C.W., Lee,Y.M., Zheng,J.Z., Sundaresan,R., Pey,K.L.

SPIE - The International Society for Optical Engineering

Poon, M. C., Deng, F., Ho, C. H., Chan, M., Lau, S. S.

MRS - Materials Research Society

Ho, C. S., Pey, K. L., Tung, C. H., Tee, K. C., Prasad, K., Saigal, D., Tan, J. J. L., Wong, H., Lee, K. H., Osipowicz, …

MRS - Materials Research Society

Adam, L. S., Law, M. E., Dokumaci, O., Haddara, Y., Murthy, C., Park, H., Hegde, S., Chidambarrao, D., Mollis, S., …

MRS - Materials Research Society

Chu,L.W., Pey,K.L., Chim,W.K., Loh,S.K., Er,E.

SPIE-The International Society for Optical Engineering

Kwok, D. T. K., Ho, A. H. P., Zeng, X. C., Chan, C., Chu, P. K., Wong, S. P.

MRS-Materials Research Society

Lin, X. W., Ibrahim, N., Topete, L., Pramanik, D.

MRS - Materials Research Society

Donthu, S.K., Chi, D.Z., Wong, A.S.W., Chua, S.J., Tripathy, S.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12