Effects of DUV resist sensitivities on lithographic process window
- Author(s):
Kemp,K.G. ( FSI International ) Williams,D.J. ( FSI International ) Cayton,J.W. ( FSI International ) Steege,P. ( FSI International ) Slonaker,S. ( ASM Lithography BV (Netherlands) ) Elliott,R.C. ( KLA Instruments Corp. ) - Publication title:
- Microlithographic Techniques in IC Fabrication
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3183
- Pub. Year:
- 1997
- Page(from):
- 49
- Page(to):
- 56
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426109 [0819426105]
- Language:
- English
- Call no.:
- P63600/3183
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Cycle-time reduction of CD targeting using automated metrology and analysis
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Comparing the transient response of a resistive-type sensor with a thin film thermocouple during the post-exposure bake process
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Postmodification as a way to improve the lithographic performance of resist materials
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Development of DUV resist formulations with excellent performance on metal substrates
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Implementation of high-contrast novolak resist process for sub-0.5-µm e-beam lithography
Society of Photo-optical Instrumentation Engineers |
6
Conference Proceedings
"IBM 193-nm bilayer resist: materials, lithographic performance, and optimization"
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |