193-nm excimer laser microstepper system (Invited Paper)

193-nm excimer laser microstepper system (Invited Paper)

Author(s):

Rizvi,N.H. ( Exitech Ltd. (UK) )
Cashmore,J.S. ( Exitech Ltd. (UK) )
Solomon,C.M. ( Exitech Ltd. (UK) )
Rumsby,P.T. ( Exitech Ltd. (UK) )
Gower,M.C. ( Exitech Ltd. (UK) )

Publication title:

Microlithographic Techniques in IC Fabrication

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3183

Pub. Year:

1997

Page(from):

30

Page(to):

37

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426109 [0819426105]

Language:

English

Call no.:

P63600/3183

Type:

Conference Proceedings

Details

TDL ID:	ZA00016934
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Microelectronics and Assembly : Microlithographic Techniques in IC Fabrication
Conf. info. (Number):	1997
Conf. info. (Venue):	Singapore
Conf. info. (Date):	1997.06.25-1997.06.26

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