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In-line testing of antenna-type test structures for separation of sources of process-induced damage

Author(s):
Publication title:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3215
Pub. date:
1997
Page(from):
101
Page(to):
108
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426475 [0819426474]
Language:
English
Call no.:
P63600/3215
Type:
Conference Proceedings

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