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Mobile charge testing of sodium-contaminated thermal oxides using corona temperature stressing

Author(s):
Publication title:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3215
Pub. Year:
1997
Page(from):
26
Page(to):
34
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426475 [0819426474]
Language:
English
Call no.:
P63600/3215
Type:
Conference Proceedings

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