Blank Cover Image

Mobile charge testing of sodium-contaminated thermal oxides using corona temperature stressing

Author(s):
Publication title:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3215
Pub. date:
1997
Page(from):
26
Page(to):
34
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426475 [0819426474]
Language:
English
Call no.:
P63600/3215
Type:
Conference Proceedings

Similar Items:

Stevie, F.A., Persson, E., DeBusk, D.K., Savchuk, A., Hoff, A.M., Edelman, P., Lagowski, J.

Electrochemical Society

Edelman,P., Savchouk,A., Wilson,M., Jastrzebski,L., Lagowski,J.J., Nauka,K., Ma,S., Hoff,A.M., DeBusk,D.K.

SPIE-The International Society for Optical Engineering

Stevie,F.A., Persson,E., DeBusk,D.K., Savchuk,A., Hoff,A.M., Edelman,P., Lagowski,J.

SPIE-The International Society for Optical Engineering

P. Edelman, A.M. Hoff, L. Jastrzebski, J. Lagowski

Society of Photo-optical Instrumentation Engineers

Hoff,A.M., DeBusk,D.K., Schanzer,R.W.

SPIE - The International Society for Optical Engineering

Wilson, M., Lagowski, J., Savtchou, A., Marinskiy, D., Jastrzebski, L., D'Amico, J.

MRS-Materials Research Society

Hoff,A.M., DeBusk,D.K.

SPIE - The International Society for Optical Engineering

Hoff, A.M., Oborina, E., Saddow, S.E., Savtchouk, A.

Trans Tech Publications

C.A.S. Ramos, M.C. Sánchez, R.K. Onmori, N. Stem

Electrochemical Society

Makarov, V.I., Tlatov, A.G., Callebaut, D.K.

ESA Publications Division

Wilson,M., Lagowski,J., Sartchouk,A., Jastrzbski,L., D'Alnico,J., DeBusk,D.K., Buczkowski,A.

SPIE - The International Society for Optical Engineering

Finfrock, D.K.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12