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Influence of oxygen precipitates on the measurement of minority carrier diffusion length in p-type silicon material using surface photovoltage technique

Author(s):
Ma,Y. ( Lucent Technologies Bell labs. )
Lee,J.L. ( Lucent Technologies Bell labs. )
Benton,J.L. ( Lucent Technologies Bell labs. )
Boone,T. ( Lucent Technologies Bell labs. )
Eaglesham,D.J. ( Lucent Technologies Bell labs. )
Higashi,G.S. ( Lucent Technologies Bell labs. )
1 more
Publication title:
In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3215
Pub. date:
1997
Page(from):
17
Page(to):
24
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426475 [0819426474]
Language:
English
Call no.:
P63600/3215
Type:
Conference Proceedings

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