Potentials for inspection and metrology of MEMS using a combined scanning electron microscope (SEM) and proximal probe microscope (PPM) (Invited Paper)
- Author(s):
- Postek,M.T. ( National Institute of Standards and Technology )
- Publication title:
- Microlithography and Metrology in Micromachining III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3225
- Pub. Year:
- 1997
- Page(from):
- 92
- Page(to):
- 101
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426574 [0819426571]
- Language:
- English
- Call no.:
- P63600/3225
- Type:
- Conference Proceedings
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