Engineering tool set for monolithic and hybrid microsystem design
- Author(s):
Boutamine,H. ( Techniques of Informatics and Microelectronics for Computer Architecture (France ) Karam,J.M. ( Techniques of Informatics and Microelectronics for Computer Architecture (France ) Courtois,B. ( Techniques of Informatics and Microelectronics for Computer Architecture (France ) Drake,P. ( Mentor Graphics ) Oudinot,J. ( Mentor Graphics ) El Tahawi,H. ( Mentor Graphics ) Cao,A. ( Mentor Graphics ) Rencz,M. ( Technical Univ.of Budapest (Hungary) ) Poppe,A. ( Technical Univ.of Budapest (Hungary) ) Szekely,V. ( Technical Univ.of Budapest (Hungary) ) - Publication title:
- Microlithography and Metrology in Micromachining III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3225
- Pub. Year:
- 1997
- Page(from):
- 76
- Page(to):
- 84
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426574 [0819426571]
- Language:
- English
- Call no.:
- P63600/3225
- Type:
- Conference Proceedings
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