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Engineering tool set for monolithic and hybrid microsystem design

Author(s):
Boutamine,H. ( Techniques of Informatics and Microelectronics for Computer Architecture (France )
Karam,J.M. ( Techniques of Informatics and Microelectronics for Computer Architecture (France )
Courtois,B. ( Techniques of Informatics and Microelectronics for Computer Architecture (France )
Drake,P. ( Mentor Graphics )
Oudinot,J. ( Mentor Graphics )
El Tahawi,H. ( Mentor Graphics )
Cao,A. ( Mentor Graphics )
Rencz,M. ( Technical Univ.of Budapest (Hungary) )
Poppe,A. ( Technical Univ.of Budapest (Hungary) )
Szekely,V. ( Technical Univ.of Budapest (Hungary) )
5 more
Publication title:
Microlithography and Metrology in Micromachining III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3225
Pub. date:
1997
Page(from):
76
Page(to):
84
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426574 [0819426571]
Language:
English
Call no.:
P63600/3225
Type:
Conference Proceedings

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