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Characterisation of Ion Implanted Layers in GaAs and Influence of Various Parameters on Device Performance

Author(s):
Bhattacharya,B.
Sai Saravanan,G.
Khatri,R.K.
Naik,A.A.
Rawal,D.S.
Sharma,H.S.
Sehgal,B.K.
Gulati,R.
Vyas,H.P.
Kumar,K.C.
Rao,A.V.S.K.
Govindacharyulu,P.A.
7 more
Publication title:
Physics of - Semiconductor Devices -
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3316
Pub. date:
1998
Vol.:
Part 2
Page(from):
1310
Page(to):
1313
Pub. info.:
New Delhi: Narosa Publishing House
ISSN:
0277786X
ISBN:
9780819427564 [081942756X]
Language:
English
Call no.:
P63600/3316
Type:
Conference Proceedings

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