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Beam induced reactions in metal-film systems

Author(s):
  • Lau, S.S. ( Dept. of Electrical Engineering and Computer Science, UCSD, La Jolla, Ca. 92093 )
  • Maenpaa, Martti ( Electrical Engineering Dept., Caltech, Pasadena, Ca. 91125 )
  • Mayer, James W. ( Dept. of Materials Science, Bard Hall, Cornell, Ithaca, N.Y. 14853 )
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. Year:
1981
Page(from):
547
Page(to):
558
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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