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Raman spectroscopic evaluation of silicides formed with a scanned electron beam

Author(s):
  • Nemanich, R.J. ( Xerox Palo Alto Research Center, Palo Alto, California 94304 )
  • Sigmon, T.W. ( Stanford Electronics Laboratories, Stanford, California 94305 )
  • Johnson, N.M. ( Xerox Palo Alto Research Center, Palo Alto, California 94304 )
  • Moyer, M.D. ( Xerox Palo Alto Research Center, Palo Alto, California 94304 )
  • Lau, S.S. ( University of California, San Diego, La Jolla, California 92093 )
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. Year:
1981
Page(from):
541
Page(to):
546
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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