Laser crystallization of deposited silicon films

Author(s):

Celler, G.K. ( Bell Laboratories, Murray Hill, New Jersey, 07974, USA )

Jeamy, H.J. ( Bell Laboratories, Murray Hill, New Jersey, 07974, USA )

Aspnes, D.E. ( Bell Laboratories, Murray Hill, New Jersey, 07974, USA )

Doherty, C.J. ( Bell Laboratories, Murray Hill, New Jersey, 07974, USA )

Sheng, T.T. ( Bell Laboratories, Murray Hill, New Jersey, 07974, USA )

Trimble, L.E. ( Bell Laboratories, Murray Hill, New Jersey, 07974, USA )

1 more

Publication title:

Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposia proceedings

Ser. no.:

1

Pub. Year:

1981

Page(from):

435

Page(to):

442

Pub. info.:

New York: North Holland

ISSN:

02729172

ISBN:

9780444005953 [0444005951]

Language:

English

Call no.:

M23500/1

Type:

Conference Proceedings