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Characterization of ion-implanted SiO2 properties applicable to laser processing

Author(s):
Teng, T.C. ( National Semiconductor, Santa Clara, California )
Shiau, Y. ( National Semiconductor, Santa Clara, California )
Chen, Y.S. ( National Semiconductor, Santa Clara, California )
Skinner, C. ( National Semiconductor, Santa Clara, California )
Peng, J.D. ( Advanced Research and Applications Corp., Sunnyvale, California )
Palkuti, L.J. ( Advanced Research and Applications Corp., Sunnyvale, California )
1 more
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. Year:
1981
Page(from):
391
Page(to):
398
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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