Scanned e-beam annealing of MOS devices
- Author(s):
- Speight, J.D. ( British Telecommunications Research Laboratories, Martlesham Heath, Ipswich 1P5 7RE, England )
- Glaccum, A.E. ( British Telecommunications Research Laboratories, Martlesham Heath, Ipswich 1P5 7RE, England )
- Machin, D. ( British Telecommunications Research Laboratories, Martlesham Heath, Ipswich 1P5 7RE, England )
- McMahon, R.A. ( Engineering Department, University of Cambridge, Cambridge CB2 1PZ, England )
- Ahmed, H. ( Engineering Department, University of Cambridge, Cambridge CB2 1PZ, England )
- Publication title:
- Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposia proceedings
- Ser. no.:
- 1
- Pub. Year:
- 1981
- Page(from):
- 383
- Page(to):
- 390
- Pub. info.:
- New York: North Holland
- ISSN:
- 02729172
- ISBN:
- 9780444005953 [0444005951]
- Language:
- English
- Call no.:
- M23500/1
- Type:
- Conference Proceedings
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