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Optimization of pulsed annealing techniques for GaAs integrated circuits

Author(s):
Martin, G.M. ( Laboratoires d'Electronique et de Physique Appliquee, 3, Avenue Descartes, 94450 Limeil-Brevannes (France) )
Mitonneau, A. ( Laboratoires d'Electronique et de Physique Appliquee, 3, Avenue Descartes, 94450 Limeil-Brevannes (France) )
Cathelin, M. ( Laboratoires d'Electronique et de Physique Appliquee, 3, Avenue Descartes, 94450 Limeil-Brevannes (France) )
Makram-Ebeid, S. ( Laboratoires d'Electronique et de Physique Appliquee, 3, Avenue Descartes, 94450 Limeil-Brevannes (France) )
Venger, C. ( Laboratoires d'Electronique et de Physique Appliquee, 3, Avenue Descartes, 94450 Limeil-Brevannes (France) )
Barbier, D. ( L.P.M., INSA, 20 Avenue Albert Einstein, 69621 Villeurbanne (France) )
Laugier, A. ( L.P.M., INSA, 20 Avenue Albert Einstein, 69621 Villeurbanne (France) )
2 more
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. Year:
1981
Page(from):
299
Page(to):
305
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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