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Transient and furnace annealing of ion implanted gallium arsenide

Author(s):
  • Williams, J.S. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology, Melbourne, 3000, Australia )
  • Harrison, H.B. ( Department of Communication and Electronic Engineering, Royal Melbourne Institute of Technology, Melbourne, 3000, Australia )
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. Year:
1981
Page(from):
209
Page(to):
222
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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