Multiple-scan e-beam method applied to a range of semiconducting materials

Multiple-scan e-beam method applied to a range of semiconducting materials

Author(s):

Shah, N.J. ( Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, England )
McMahon, R.A. ( Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, England )
Williams, J.G.S. ( Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, England )
Ahmed, H. ( Engineering Department, Cambridge University, Trumpington Street, Cambridge CB2 1PZ, England )

Publication title:

Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposia proceedings

Ser. no.:

1

Pub. Year:

1981

Page(from):

201

Page(to):

208

Pub. info.:

New York: North Holland

ISSN:

02729172

ISBN:

9780444005953 [0444005951]

Language:

English

Call no.:

M23500/1

Type:

Conference Proceedings

Details

TDL ID:	ZA00016904
Series ID:	PA00000010
Conf. info. (Name):	Materials Research Society Annual Meeting
Conf. info. (Number):	1980
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1980.11.00

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