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Pulsed laser annealing effects in high dose rate silicon implants

Author(s):
Williams, J.S. ( R.M.I.T. Melbourne, 3000, Australia )
Pogany, A.P. ( R.M.I.T. Melbourne, 3000, Australia )
Beanland, D.G. ( R.M.I.T. Melbourne, 3000, Australia )
Chivers, D.J. ( Harwell Research Laboratories, Didcot, England )
Kenny, M.J. ( AAEC Research Establishment, Lucas Heights, Australia )
Rose, A. ( AAEC Research Establishment, Lucas Heights, Australia )
Scott, M.D. ( AAEC Research Establishment, Lucas Heights, Australia )
2 more
Publication title:
Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
1
Pub. date:
1981
Page(from):
169
Page(to):
175
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444005953 [0444005951]
Language:
English
Call no.:
M23500/1
Type:
Conference Proceedings

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