Advances in Laser Direct Writing
- Author(s):
- Publication title:
- Laser processing : surface treatment and film deposition
- Title of ser.:
- NATO ASI series. Series E, Applied sciences
- Ser. no.:
- 307
- Pub. Year:
- 1996
- Page(from):
- 895
- Page(to):
- 906
- Pages:
- 12
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISSN:
- 0168132X
- ISBN:
- 9780792339014 [0792339010]
- Language:
- English
- Call no.:
- N11482/307
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
Laser micromachining of silicon: a new technique for fabricating terahertz imaging arrays
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Contamination rates of optical surfaces at 157 nm: impurities outgassed from construction materials and from photoresists
SPIE-The International Society for Optical Engineering |
Materials Research Society |
4
Conference Proceedings
Contamination rates of optical surfaces at 157 nm in the presence of hydrocarbon impurities
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Long-term laser durability testing of optical coatings and thin films for 157-nm lithography
SPIE-The International Society for Optical Engineering |