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Laser Chemical Vapor Deposition of Titanium Nitride and Process Diagnostics with Laser Induced Fluorescence Spectroscopy

Author(s):
Publication title:
Laser processing : surface treatment and film deposition
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
307
Pub. Year:
1996
Page(from):
693
Page(to):
701
Pages:
9
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792339014 [0792339010]
Language:
English
Call no.:
N11482/307
Type:
Conference Proceedings

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