Blank Cover Image

GROWTH, PROPERTIES AND APPLICATIONS OF EPITAXIAL SILICDES

Author(s):
Mantl S.  
Publication title:
Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
234
Pub. Year:
1993
Page(from):
445
Page(to):
469
Pages:
25
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792322658 [0792322657]
Language:
English
Call no.:
N11482/234
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Growth, Patterning and Microelectronic Applications of Epitaxial CobaltDisilicide

Mantl, S., Kappius, L., Antons, A., Loken, M., Klinkhammer, F., Dolle, M., Zhao, Q. T., Mesters, S., Buchal, Ch., Bay, …

MRS - Materials Research Society
7 Conference Proceedings ELECTRICAL AND OPTICAL PROPERTIES OF FeSi2 LAYERS

Radermacher, K., Skeide, O., Carius, R., Klomfass, J., Mantl, S.

MRS - Materials Research Society
2 Conference Proceedings ALLOTAXY: A NEW METHOD FOR EPITAXIAL GROWTH OF COMPOUND THIN FILMS

Mantl, S., Bay. H. L., Dieker, Ch.

Materials Research Society
8 Conference Proceedings STABILITY OF NANCOSCALE COBALT SILICDE FILM FORMATION ON POLYSILICON

Pramanick, S., Erokhin, Yu N., Patnaik, B. K., Rozgonyi, G.A., Gambino, J. P.

Materials Research Society
3 Conference Proceedings The Epitaxial Growth, Properties and Device Applications of AlGaInP

Hobson, W.S.

Electrochemical Society
9 Conference Proceedings Optical Properties of Bulk and Epitaxial ZnO for Waveguide Applications

Ganesan, S., Feng, Z.C., Mehta, D., Kandoor, S., Wornyo, E.J., Nause, J., Ferguson, I.

Materials Research Society
4 Conference Proceedings FORMATION OF BURIED EPITAXIAL Co SILICIDES BY ION IMPLANTATION

Kohlhof K., Mantl S., Strizker B.

Kluwer Academic Publishers
10 Conference Proceedings CoSi2 PRECIPITATE COARSENING DURING FORMATION OF BURIED EPITAXIAL CoSi2 LAYERS BY ION BEAM SYNTHESIS

Jebasinski, R., Mantl, S., Radermacher, K., Fichtner, P., Jager, W., Buchal, Ch.

Materials Research Society
5 Conference Proceedings MBE Growth,Properties and Applications of Epitaxial Dielectric Fluoride Films on Semiconductors

Sokolov,N.S.

Trans Tech Publications
11 Conference Proceedings Solid phase growth and properties of Mg2Si epitaxial films on Si(111)

Galkin, N. G., Vavanova, S. V., Galkin, K. N., Maslov, A. M.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings GROWTH OF BURIED CoSi2 LAYERS IN Si(100) BY MOLECULAR BEAM ALLOTAXY

Mantl, S., Bay, H. L., Michel, I., Mesters, S., Trinkaus, H.

MRS - Materials Research Society
12 Conference Proceedings Reactive Growth and Properties of Epitaxial Fe-Mg-O Spinel Films on (100)MgO

Senz, S., Graff, A., Teichert, C., Zimnol, M., Sieber, H., De, S. K., Oepen, H. P., Hesse, D., Kirschner, J., Gosele, U. …

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12