Blank Cover Image

PHYSICAL VAPOR DEPOSITION OF MULTICOMPONENT OXIDE THIN FILMS: TECHNIQUES, BASIC DEPOSITION PROCESSES AND FILM PROCESSING-MICROSTRUCTURE-PROPERTY RELATIONSHIPS

Author(s):
Publication title:
Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
234
Pub. Year:
1993
Page(from):
151
Page(to):
208
Pages:
58
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792322658 [0792322657]
Language:
English
Call no.:
N11482/234
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A REVIEW OF ORIENTATION-MICROSTRUCTURE-PROPERTY RELATIONSHIPS FOR PZT/METAL OR METAL-OXIDE LAYERED HETEROSTRUCTURES

Auciello, Orlando, Al-Shareef, H. N., Gifford, K. D., Lichtenwalner, D. J., Dat, R., Bellur, K. R., Kingon, A. I., …

MRS - Materials Research Society
7 Conference Proceedings SCANNING TUNNELING MICROSCOPY AND SPECTROSCOPY OF Y-Ba-Cu-O THIN FILMS PRODUCED BY ION BEAM SPUTTER DEPOSITION

Chapman, R.C., Auciello, O., Lichtenwalner, D.J., Adu, R.P., Soble II, C.N., Christensen, K.N., Woolcott, Jr., R.R., …

Materials Research Society
2 Conference Proceedings STUDIES ON ION SCATTERING AND SPUTTERING PROCESSES RELEVANT TO ION BEAM SPUTTER DEPOSITION OF MULTICOMPONENT THIN FILMS

Auciello, O., Ameen, M.S., Krauss, A.R., Kingon, A.I., Ray, M.A.

Materials Research Society
8 Conference Proceedings COMPUTER SIMULATION OF SCATTERED ION AND SPUTTERED SPECIES EFFECTS IN ION BEAM SPUTTER-DEPOSITION OF HIGH TEMPERATURE SUPERCONDUCTING THIN FILMS

Krauss, Alan R., Auciello, Orlando

Materials Research Society
3 Conference Proceedings Ba1-xSrTiO3 thin film sputter-growth processes and electrical property relationship for high frequency devices

Im, Jaemo, Auciello, O., Streiffer, S. K., Baumann, P. K., Eastman, J. A., Kaufman, D. Y., Krauss, A. R., Li, Jianxing

MRS-Materials Research Society
9 Conference Proceedings EFFECTS OF PROCESS PARAMETERS ON THE ABLATED FLUX CHARACTERISTICS DURING PULSED-LASER ABLATION OF LEAD ZIRCONATE TITANATE (PZT)

Lichtenwalner, D. J., Auciello, O., Dat, R., Barnes, R., Schreiner, A. F., Hankins, O. E., Kingon, A. I.

MRS - Materials Research Society
4 Conference Proceedings In Situ Mass Spectroscopy of Recoiled Ion Studies of Degradation Processes in SrBi2Ta2O9 Thin Films During Hydrogen Gas Annealing

Im, J., Auciello, O., Krauss, A. R., Gruen, D. M., Chang, R. P. H., Kim, S. H., Kingon, A. I.

MRS - Materials Research Society
10 Conference Proceedings Towards the Fabrication of Ultra-Thin SOI on Si (001) using Epitaxial Oxide and Epitaxial Semiconductor Growth Processes

D. Lichtenwalner, J. M. Hydrick, V. Vankova, V. Misra, J. Maria, A. I. Kingon

Electrochemical Society
5 Conference Proceedings ION-BEAM REACTIVE SPUTTER DEPOSITION OF MgO THIN FILMS ON SILICON AND SAPPHIRE SUBSTRATES

Chow, Alice F., Rou, Shang Hsieh, Lichtenwalner, Daniel J., Auciello, Orlando, Kingon, Angus I.

Materials Research Society
11 Conference Proceedings In Situ Real-Time Studies of Film Growth Processes Using Ion Scattering and Direct Recoil Spectroscopy Techniques

Smentkowski, V. S., Krauss, A. R., Auciello, O., Im, J., Gruen, D. M., Holecek, J., Waters, K., Schultz, J. A.

MRS - Materials Research Society
6 Conference Proceedings GROWTH OF EPITAXIAL KNbO3 THIN FILMS

Graettinger, Thomas M., Morris, P. A., Roshko, A., Kingon, A. I., Auciello, O., Lichtenwalner, D. J., Chow, A. F.

MRS - Materials Research Society
12 Conference Proceedings In Situ Real-Time Ellipsometry Study of Dynamic Processes of YBa2Cu3O7-x Thin Films

Gao, Y., Mueller, A. H., Irene, E. A., Auciello, O., Krauss, A. R., Schultz, J. A.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12