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ON THE TRANSPORT OF SPUTTERED SPECIES IN PLASMA SPUTTER-DEPOSITION SYSTEMS

Author(s):
Publication title:
Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
234
Pub. Year:
1993
Page(from):
115
Page(to):
120
Pages:
6
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792322658 [0792322657]
Language:
English
Call no.:
N11482/234
Type:
Conference Proceedings

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