Solid phase epitaxial recrystallization of AlN films on sapphire (0001): A novel substrate approach for GaN epitaxy

Solid phase epitaxial recrystallization of AlN films on sapphire (0001): A novel substrate approach for GaN epitaxy

Author(s):

Vispute, R. D.

Publication title:

Substrate engineering - paving the way to epitaxy : sympoisum held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

587

Pub. Year:

2000

Page(from):

O7.4.1

Pub. info.:

Warrendale, Pa.: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558994959 [1558994955]

Language:

English

Call no.:

M23500/587

Type:

Conference Proceedings

Details

TDL ID:	ZA00016704
Series ID:	PA00000011
Conf. info. (Name):	MRS Fall Meeting
Conf. info. (Number):	1999
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1999.11.29-1999.12.03

Similar Items:

1 Conference Proceedings Pulsed-laser-deposited AlN films for high-temperature SiC MIS devices Vispute, R. D., Patel, A., Baynes, K., Ming, B., Sharma, R. P., Venkatesan, T., Scozzie, C. J., Lelis, A., Zheleva, T., … MRS-Materials Research Society	7 Conference Proceedings PLD Epitaxial TiN Contacts to 6H-SiC and GaN Talyansky, V., Vispute, R. D., Andronescu, S. N., Iliadis, A. A., Jones, K. A., Choopun, S., Downes, M. J., Sharma, R. … MRS - Materials Research Society
2 Conference Proceedings Pulsed Laser Etching of GaN and AlN Films Chen, H., Vispute, R. D., Talyansky, V., Enck, R., Ogale, S. B., Dahmas, T., Choopun, S., Sharma, R. P., Venkatesan, T., … MRS - Materials Research Society	8 Conference Proceedings Epitaxial Growth of Zinc-Blende AlN by Plasma Source Molecular Beam Epitaxy Thompson, M. P., Auner, G. W., Drews, A. R., Zheleva, T. S., Jones, K. A. MRS - Materials Research Society
3 Conference Proceedings Pulsed Laser Deposition: A Novel Growth Technique for Wide-Bandgap Semiconductor Research Vispute, R. D., Enck, R., Patel, A., Ming, B., Sharma, R. P., Venkatesan, T., Scozzie, C. J., Lelis, A., McLean, F. B., … Trans Tech Publications	9 Conference Proceedings Pulsed Laser Deposition of Gallium Nitride on Sapphire Talyansky, V., Vispute, R. D., Sharma, R. P., Choopun, S., Downes, M. J., Venkatesan, T., Li, Y. X., Salamanca-Riba, L. … MRS - Materials Research Society
4 Conference Proceedings Stress Origin and Relaxation in Epitaxial AlN Thin Films on SiC Bathe, Ravi, Vispute, R.D., Habersat, Daniel, Sharma, R.P., Venkatesan, T., Scozzie, C.J., Ervin, M.H., Jones, Ken Materials Research Society	10 Conference Proceedings Growth and Characterization of GaN and AlxGa1-xN Thin Films Achieved Via Lateral- and /or Pendeo-Epitaxial Overgrowth on 6H-SiC(0001) Substrates Davis, R. F., Nam, O-H., Zheleva, T. S., Bremser, M. D., Linthicum, K. J., Gehrke, T., Rajagopal, P., Thomson, D. B., … MRS - Materials Research Society
5 Conference Proceedings Pulsed laser deposition of TiN,AIN,and GaN films on sapphire Talyansky,V., Vispute,R.D., Stanton,M., Downes,M., Chupoon,S., Sharma,R.P., Venkatesan,T., Li,Y.X., Salamanca-Riba,L., … SPIE-The International Society for Optical Engineering	11 Conference Proceedings Approaches for Reduction of the Defect Density in Group III Nitride Based Heterostructures Zheleva, T. S., Karoui, F., Kirchner, K., Derenge, M., Jones, K.A., Vispute, R.D., Venkatesan, T. Materials Research Society
6 Conference Proceedings Lateral Epitaxial Overgrowth and Pendeo Epitaxy of 3C-SiC on Si Substrates Saddow, S. E., Carter, G., Geil, B., Zheleva, T., Melnychuck, G., Okhuysen, M. E., Mazzola, M. S., Vispute, R. D., … Trans Tech Publications	12 Conference Proceedings Pulsed Laser Deposition of Highly Crystalline GaN Films on Sapphire Vispute, R. D., Talyansky, V., Choopun, S., Enck, R., Dahmas, T., Ogale, S. B., Shama, R. P., Venkatesan, T., Li, Y. X., … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12