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Convergent-beam parallel detection x-ray diffraction system for characterizing combinatorial epitaxial thin films

Author(s):
Omote,K. ( Rigaku Corp. )
Kikuchi,T.
Harada,J.
Kawasaki,M.
Ohtomo,A.
Ohtani,M.
Ohnishi,T.
Komiyama,D.
Koinuma,H.
4 more
Publication title:
Combinatorial and composition spread techniques in materials and device development : 26 January 2000, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3941
Pub. date:
2000
Page(from):
84
Page(to):
91
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435583 [0819435589]
Language:
English
Call no.:
P63600/3941
Type:
Conference Proceedings

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