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Novel micropump actuated by thin film shape memory alloy

Author(s):
Xu,D. ( Shanghai Jiao Tong Univ. )
Cai,B.
Ding,G.
Zhou,Y.
Yu,A.
Wang,L.
Zhao,X.
2 more
Publication title:
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3891
Pub. date:
1999
Page(from):
369
Page(to):
375
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434920 [0819434922]
Language:
English
Call no.:
P63600/3891
Type:
Conference Proceedings

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