Novel micropump actuated by thin film shape memory alloy
- Author(s):
Xu,D. ( Shanghai Jiao Tong Univ. ) Cai,B. Ding,G. Zhou,Y. Yu,A. Wang,L. Zhao,X. - Publication title:
- Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3891
- Pub. Year:
- 1999
- Page(from):
- 369
- Page(to):
- 375
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434920 [0819434922]
- Language:
- English
- Call no.:
- P63600/3891
- Type:
- Conference Proceedings
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