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Micromachined accelerometer based on electron tunneling

Author(s):
Yang,Y. ( Southeast Univ. )
Li,L.
Xu,Y.
Zhao,Y.
Liang,C.
Wei,T.
1 more
Publication title:
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3891
Pub. Year:
1999
Page(from):
121
Page(to):
125
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434920 [0819434922]
Language:
English
Call no.:
P63600/3891
Type:
Conference Proceedings

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