Integration challenges at 0.15-ｦﾌm technology node

Integration challenges at 0.15-ｦﾌm technology node

Author(s):: Moghadam,F. ( Applied Materials Inc )
Publication title:: Microelectronic Device Technology III
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 3881
Pub. Year:: 1999
Page(from):: 8
Page(to):: 14
Pub. info.:: Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819434784 [0819434787]
Language:: English
Call no.:: P63600/3881
Type:: Conference Proceedings

Details

TDL ID:	ZA00016694
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Microelectronic Dvece Technology
Conf. info. (Number):	1999 : 3rd
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.09.22-1999.09.23

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