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Evolution of sculptured thin films

Author(s):
Publication title:
Engineered nanostructural films and materials : 22-23 July 1999, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3790
Pub. date:
1999
Page(from):
133
Page(to):
141
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432766 [0819432768]
Language:
English
Call no.:
P63600/3790
Type:
Conference Proceedings

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