Evolution of sculptured thin films
- Author(s):
- Messier,R.F. ( The Pennsylvania State Univ. )
- Sunal,P.D.
- Venugopal,V.C.
- Publication title:
- Engineered nanostructural films and materials : 22-23 July 1999, Denver, Colorado
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3790
- Pub. Year:
- 1999
- Page(from):
- 133
- Page(to):
- 141
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432766 [0819432768]
- Language:
- English
- Call no.:
- P63600/3790
- Type:
- Conference Proceedings
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