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Temperature-stabilized silicon-based surface-acoustic-wave gas sensors for the detection of solvent vapors

Author(s):
Publication title:
Chemical microsensors and applications : 4-5 November 1998, Boston, Massachusetts
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3539
Pub. Year:
1998
Page(from):
123
Page(to):
130
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430007 [0819430005]
Language:
English
Call no.:
P63600/3539
Type:
Conference Proceedings

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