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Soft x-ray narrow-band laser plasma sources for nanotechnology

Author(s):
Publication title:
Third International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering : 7-11 June 1999, St. Petersburg, Russia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4064
Pub. Year:
2000
Page(from):
33
Page(to):
37
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436993 [0819436992]
Language:
English
Call no.:
P63600/4064
Type:
Conference Proceedings

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