Nondestructive measurement of in-plane residual stress in silicon strips

Nondestructive measurement of in-plane residual stress in silicon strips

Author(s):

Publication title:

Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

591

Pub. Year:

2000

Page(from):

283

Pub. info.:

Warrendale, Pa.: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558994997 [1558994998]

Language:

English

Call no.:

M23500/591

Type:

Conference Proceedings

Details

TDL ID:	ZA00016644
Series ID:	PA00000011
Conf. info. (Name):	Nondestructive Methods for Materials Characterization : Symposium
Conf. info. (Number):	1999
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1999.11.29-1999.11.30

Similar Items:

1 Conference Proceedings IN-PLANE RESIDUAL STRESSES IN FILAMENT-EVAPORATED ALUMINUM FILMS ON SINGLE CRYSTAL SILICON WAFERS Park, Hai-Woong, Danyluk, Steven Materials Research Society	7 Conference Proceedings Measurement of the Fracture Energy of SiO2/TiN Interfaces Using the Residually-Stressed Thin-Film Micro-Strip Test Xu, Guanghai, Ragan, D. D., Clarke, D. R., He, Ming Y., Ma, Qing, Fujimoto, H. MRS - Materials Research Society
2 Conference Proceedings Portable holographic interferometer for residual stress measurement and nondestructive testing(NDT)of pipelines Onishchenko,Yu., Kniazkov,A., Shulz,J., Salamo,G.J. SPIE - The International Society for Optical Engineering	8 Conference Proceedings The limits of classical beam theory for bent strip residual stress measurements in plated metals T. Sanderson Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Kinetics of Damage Generation on Single-Crystal Silicon Surfaces: The Influence of Lubricant Adsorption Li, Yuheng, Danyluk, Steven, Gunsel, Selda, Lockwood, Frances American Chemical Society	9 Conference Proceedings MEASUREMENT OF RESIDUAL STRESS-INDUCED BENDING MOMENT OF p+ SILICON FILMS Chu, W. H., Mehregany, M., Ning, X., Pirouz, P. Materials Research Society
4 Conference Proceedings Residual stress measurement using indentation and a radial in-plane ESPI interferometer Suterio, R., Albertazzi, A. G. Jr., Amaral, F. K., Pacheco, A. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Nondestructive measurement of the residual stress TiN thin film coated on AISI 304 substrate by x-ray stress analyzer [6029-17] Zhang Y. K., Feng A. X., Lu J. Z., Kong D. J., Tang C. P. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Portable residual stress measurement device using ESPI and a radial in-plane interferometer Albertazzi Jr.,A., Kanda,C., Borbes,M.R., Hrebabetzky,F. SPIE-The International Society for Optical Engineering	11 Conference Proceedings A STUDY OF SUBSURFACE DAMAGE GENERATION BY SINGLE SCRATCHES OF SILICON Ahn, J. H., Danyluk, S. Materials Research Society
6 Conference Proceedings A radial in-plane DSPI interferometer using diffractive optics for residual stresses measurement A. Albertazzi G., Jr., M. R. Viotti, W. A. Kapp Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Uncertainty in Residual Stress Measurements D. M. Goudar, S. Hossain, C. E. Truman, D. J. Smith American Society of Mechanical Engineers

1

2

3

4

5

6

7

8

9

10

11

12