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Characterization of Ni- and Ni(Pt)-sillicide formation on narrow polycrystalline Si lines by raman spectroscopy

Author(s):
Lee, P. S.
Mangelinck, D.
Pey, K. L.
Ding, J.
Osipowicz, T.
Ho, C. S.
Chen, G. L.
Chan, L.
3 more
Publication title:
Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
591
Pub. Year:
2000
Page(from):
269
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994997 [1558994998]
Language:
English
Call no.:
M23500/591
Type:
Conference Proceedings

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