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Silicon-Containing Block Copolymer Resist Materials

Author(s):
Publication title:
Microelectronics technology : polymers in advanced imaging and packaging : developed from a symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., and the Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995
Title of ser.:
ACS symposium series
Ser. no.:
614
Pub. date:
1995
Page(from):
281
Pub. info.:
Washington, D.C.: American Chemical Society
ISSN:
00976156
ISBN:
9780841233324 [0841233322]
Language:
English
Call no.:
A05800/614
Type:
Conference Proceedings

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