Silicon-Containing Block Copolymer Resist Materials

Silicon-Containing Block Copolymer Resist Materials

Author(s):

Publication title:

Microelectronics technology : polymers in advanced imaging and packaging : developed from a symposium sponsored by the ACS Division of Polymeric Materials: Science and Engineering, Inc., and the Polymers for Microelectronics Division of the Society of Polymer Science, Japan, at the 209th National Meeting of the American Chemical Society, Anaheim, California, April 2-6, 1995

Title of ser.:

ACS symposium series

Ser. no.:

614

Pub. Year:

1995

Page(from):

281

Pub. info.:

Washington, D.C.: American Chemical Society

ISSN:

00976156

ISBN:

9780841233324 [0841233322]

Language:

English

Call no.:

A05800/614

Type:

Conference Proceedings

Details

TDL ID:	ZA00016637
Series ID:	PA00000004
Conf. info. (Name):	National Meeting of the American Chemical Society
Conf. info. (Number):	209th
Conf. info. (Venue):	Anaheim, CA, USA
Conf. info. (Date):	1995.04.02-1995.04.06

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