In Situ Spectroscopic Ellipsometry Studies of the Interaction Process of Ethene With Si Surfaces During SiC Formation

In Situ Spectroscopic Ellipsometry Studies of the Interaction Process of Ethene With Si Surfaces During SiC Formation

Author(s):

Wohner, T.

Publication title:

In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

569

Pub. Year:

1999

Page(from):

95

Pub. info.:

Warrendale, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994768 [1558994769]

Language:

English

Call no.:

M23500/569

Type:

Conference Proceedings

Details

TDL ID:	ZA00016595
Series ID:	PA00000011
Conf. info. (Name):	Symposium on in situ process diagnostics and modelling
Conf. info. (Number):	1999
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1999.04.06-1999.04.07

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