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Real-Time Characterization of Non-Ideal Surfaces and Thin-Film Growth by Advanced Ellipsometric Spectroscopies

Author(s):
Collins, R. W.
Rovira, P. I.
Ferlauto, A. S.
Koh, J.
An, I.
Zapien, J. A.
Messier, R.
Wronski, C. R.
3 more
Publication title:
In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
569
Pub. Year:
1999
Page(from):
43
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994768 [1558994769]
Language:
English
Call no.:
M23500/569
Type:
Conference Proceedings

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