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In Situ Etch Rate Measurements by Alpha-Particle Energy Loss

Author(s):
Levy, Y.
Ballestad, A.
Davies, M.
Feng, Y.
Kelson, I.
Mandeville, W. J.
Pacradouny, V.
Schmalz, A.
Tiedje, T.
Young, J. F.
5 more
Publication title:
In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
569
Pub. Year:
1999
Page(from):
29
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994768 [1558994769]
Language:
English
Call no.:
M23500/569
Type:
Conference Proceedings

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