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In Situ Real-Time Studies of Film Growth Processes Using Ion Scattering and Direct Recoil Spectroscopy Techniques

Author(s):
Smentkowski, V. S.
Krauss, A. R.
Auciello, O.
Im, J.
Gruen, D. M.
Holecek, J.
Waters, K.
Schultz, J. A.
3 more
Publication title:
In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
569
Pub. Year:
1999
Page(from):
3
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994768 [1558994769]
Language:
English
Call no.:
M23500/569
Type:
Conference Proceedings

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